??1.設(shè)備規(guī)格-1
??◆ Material Thickness
??- PET : 25 ~ 200?
??◆ Roll Dimension
ITEM |
Min |
Max |
Witdh(膜寬幅) |
650mm |
1700mm |
Diameter |
|
900mm |
? ◆ Winding
ITEM |
Description |
Web Speed |
0.5 .. 10m/min |
Unwind |
70 … 300N |
Rewind |
70 … 300N |
??1.設(shè)備規(guī)格-2
??◆ Vacuum Condition (真空度規(guī)格)
No |
Description |
Base Pressure (基礎(chǔ)真空度) |
≤ 7.0 × 10-6 mbar 以下 |
Process Pressure (工程真空度) |
1 … 7 × 10-3 mbar |
Venting Time (排氣時(shí)間) |
Approx. 20minutes |
??1.網(wǎng)絡(luò)設(shè)備由PLC I/O系統(tǒng)控制,可以實(shí)時(shí)檢測(cè)( Profibus DP)??◆ Machine Control (設(shè)備控制)
??- Type Q-PLC (made by MITSUBISHI)
??2.卷繞驅(qū)動(dòng)由AC servo driver system精密控制 (Tension Control)
??3. Data transfer : Profibus DP interface with fiber optics (TMP, MF)
??4. System Automation (系統(tǒng)自動(dòng)化)
??- Pumping Function (Ramp up/down)
??- Deposition parameter storage(儲(chǔ)存鍍膜條件)
??- Automatic process stop (錯(cuò)誤發(fā)生時(shí))
??- 各產(chǎn)品自動(dòng)升級(jí)(Recipe)
??2. 設(shè)備裝置-1
??◆ Dimensions & Weight
ITEM |
Description |
System Lay Out |
Approx. 18000mm×22000mm |
Width (Chamber) |
Approx. 8100mm |
Height (Chamber) |
Approx. 3500mm |
Weight (Chamber) |
Approx. 40,000kg |
??◆ Electrical services???2Drum腔體為基準(zhǔn),根據(jù)設(shè)備規(guī)格裝置也會(huì)變更。
ITEM |
Description |
Voltage |
380v ±10%, 50Hz, 3 Phase |
Average consumption |
Approx. 500kw |
??◆ Cooling Water Spec (冷卻水裝置)??
2. 設(shè)備裝置-2
ITEM |
Description |
Inlet pressure (輸入壓力) |
4……6 bar |
Outlet pressure (輸出壓力) |
0.1…..1 bar, open drain |
Consumption |
Max. 70m3/h Average 50 m3/h |
Temperature (Inlet) 輸入溫度 |
Min : 17℃, Max : 23℃ |
Carbonate hardness 碳酸鹽硬度 |
< 6 … 8′dh
|
pH valus |
8.5 … 10 |
CO2 content |
Max 15 mg/l |
Cl content |
Max 20 mg/l |
?◆ Compressed air (空氣)?
?2. 設(shè)備制造-3
ITEM |
Description |
Pressure (壓力) |
6 … 7 bar |
Average consumption |
Approx. 1 m3/h |
Oil content |
Max. 6 mg/m3 |
??◆. 腔體構(gòu)造
??◆. Cathode & Cooling Drum 構(gòu)造
??◆ PEM system 持有控制技術(shù)